Heat insulating unit for substrate processing apparatus



FIG. 1 is a front, top and right side perspective view of a heatinsulating unit for substrate processing apparatus showing my newdesign;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a left side elevational view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a top plan view thereof; and,

FIG. 7 is a bottom plan view.

CLAIM We claim the ornamental design for a heat insulating unit forsubstrate processing apparatus, as shown (and described).